Archive: May, 2013

C. Edwards, et al., Digital projection photochemical etching defines gray-scale features, Opt. Exp., 21(11), pp.13547-13554 (2013)

Posted on 05/30/13 by Taewoo

PDF Link We demonstrate a maskless photochemical etching method that is capable of performing one-step etching of multi-level structures. This method uses a digital projector to focus an image onto the sample and define the etching pattern. By combining digital projection photochemical etching with diffraction phase microscopy, etch heights can be measured in situ in […]

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