C. Edwards, et al., Digital projection photochemical etching defines gray-scale features, Opt. Exp., 21(11), pp.13547-13554 (2013)

C. Edwards, et al., Digital projection photochemical etching defines gray-scale features, Opt. Exp., 21(11), pp.13547-13554 (2013)

PDF Link We demonstrate a maskless photochemical etching method that is capable of performing one-step etching of multi-level structures. This...